Developments in realistic design for aperiodic Mo/Si multilayer mirrors.

نویسندگان

  • A L Aquila
  • F Salmassi
  • F Dollar
  • Y Liu
  • E Gullikson
چکیده

Aperiodic multilayers have been designed for various applications, using numeric algorithms and analytical solutions, for many years with varying levels of success. This work developed a more realistic model for simulating aperiodic Mo/Si multilayers to be used in these algorithms by including the formation of MoSi(2). Using a genetic computer code we were able to optimize a 45 masculine multilayer for a large bandpass reflection multilayer that gave good agreement with the model.

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عنوان ژورنال:
  • Optics express

دوره 14 21  شماره 

صفحات  -

تاریخ انتشار 2006